Suppresses power generation that may occurin pipe line.
Easy to respond to the temperature of thesemiconductor manufacturing environment
Optimized for clean rooms
Easy to install and reinstall due to the flexibility
of the material used
Reinforces the safety of the process environmentthrough the application of materials with minimized outgassing.
Suppresses power generation that
may occur in pipe line.
Excellent heat transfer through perfect
adhesion to the object to be heated
Low cost and high efficiency
Heating solution including a heater jacket
Control solutions for controlling heaters
Realizes stable temperature through a PIDcontrol system
Fault detection device for practical heater use
Supplements that make up the heater